乙硅烷

• 产品号: 463043
• CAS号: 1590-87-0
• 分子式: H6Si2
• 分子量: 62.21864

产品别名

• 标题: Disilane
• IUPAC标准名: disilane
• IUPAC传统名: disilane

产品登记号

• PubChem SID: 24869889
• CAS号: 1590-87-0
• EC号: 216-466-5
• MDL号: MFCD00054678

产品性质

• GHS警示词: Danger
• GHS危险声明: H220-H280-H312-H315-H319-H332-H334-H335
• 欧盟危险性物质标志: 易燃性(Flammable) (F)
• 欧盟危险性物质标志: 有害性(Harmful) (Xn)
• 个人保护装置: Eyeshields, Faceshields, Gloves, half-mask respirator (US), multi-purpose combination respirator cartridge (US)
• GHS警示性声明: P210-P261-P280-P305 + P351 + P338-P342 + P311-P410 + P403
• RID/ADR: UN 3161 2.1
• 危险公开号: 17-20/21-36/37/38-42
• 安全公开号: 16-24-26-36/37/39
• 联合国危险货物等级: 2.1
• 联合国危险货物编号: 3161
• 德国WGK号: 3
• 级别: electronic grade
• 杂质: ≤50 ppm Higher silanes
• 杂质: <0.2 ppm Chlorosilanes
• 杂质: <1 ppm Argon (Ar) + Oxygen (O2)
• 杂质: <1 ppm Carbon dioxide (CO2)
• 杂质: <1 ppm Nitrogen (N2)
• 杂质: <1 ppm THC
• 杂质: <1 ppm Water
• 杂质: <5 ppm Siloxanes
• 线性分子式: Si2H6
• 外观: gas
• 沸点: -14.5 °C(lit.)
• 闪点: <10 °C
• 闪点: <50 °F
• 熔点: -132.6 °C(lit.)
• 转变温度: critical temperature 150.9 °C

产品详细信息

详细说明 (English)

Features and Benefits
Disilane is used for the deposition of amorphous silicon, epitaxial silicon and silicon based dielectrics via rapid low-temperature chemical vapor depsition (LTCVD).2 Disilane is also used in the epitaxial growth of SiGe films by molecular beam epitaxy (MBE) in conjunction with solid sources of germanium.3 Precursor for the rapid, low temperature deposition of epitaxial silicon and silicon-based dielectrics.4
General description
Atomic number of base material: 14 Silicon
Packaging
20 g in ss cylinder
Application
Precursor for the rapid, low temperature deposition of epitaxial silicon and silicon-based dielectrics.1
Recommended products
Stainless steel regulators Z527416 or Z527424 are recommended.

详细说明 (简体中文)

Features and Benefits
通过快速低温化学气相沉积 (LTCVD)，本品可用于无定形硅、外延硅和硅基电介质的沉积。2通过分子束外延 (MBE)，与锗的固体原料相结合，还可用于硅锗薄膜的外延生长。3外延硅和硅基电介质快速低温沉积的前体。4
General description
Atomic number of base material: 14 Silicon
包装
20 g in ss cylinder
Application
外延硅和硅基电介质快速低温沉积的前体。1
Recommended products
推荐使用不锈钢调节器 Z527416 或 Z527424。